Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]
Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA
2000-01-01
13 pages
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]
British Library Conference Proceedings | 2000
|Standardization in optics characterization (Invited Paper) [4099-14]
British Library Conference Proceedings | 2000
|Fast-scanning ellipsometry for thin film characterization [4099-39]
British Library Conference Proceedings | 2000
|DataCite | 1924
Lithography: a look at what is ahead (Invited Paper) [4099-01]
British Library Conference Proceedings | 2000
|