Measurement of thicknesses and refractive indices by Iow-coherence confocal interferometric microscopy
International conference on optics and optoelectronics ; 1998 ; Dehradun; India
1999-01-01
13 pages
Also known as ICOL-98
Aufsatz (Konferenz)
Englisch
optoelectronics , optics , SPIE , ICOL
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