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keywords:("heizen")


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1–3 of 3 hits
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    High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes

    Ayazi, F. / Najafi, K. | Tema Archive | 2000
    Keywords: DRIE (deep reactive ion etching)

    Production of indium phosphide solar cells for space power generation

    Okazaki, H. / Takamoto, T. / Takamura, H. et al. | Tema Archive | 1988
    Keywords: MESA ETCHING

    Wafer scale integration enabling space science

    Wesolek, D.M. / Darrin, M.A.G. / Osiander, R. | Tema Archive | 2008
    Keywords: DRIE (deep reactive ion etching)