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title: Optical metrology roadmap for the semiconductor, optical, and data storage industries
Advanced methods for surface and subsurface defect characterization of optical components [4099-34]
Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]
Accuracy of the thin metallic wires diameter using Fraunhofer diffraction technique [4099-31]
2D-area/3D-volume holographic optical storage nanotechnology [4099-22]