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micro-optics
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micromechanics
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title: Miniaturized systems with micro-optics and micromechanics II
Actuation of polysilicon surface-micromachined mirrors [2687-07]
Analysis of optical beam steering using phased micromirror arrays [2687-08]
Application of micro- and nanotechnologies for the fabrication of optical devices [3276-100]
Aspherization of cylindrical lenses by laser irradiation [2687-20]
Assembling of micro-optical components [3008-27]
Automatic test equipment for the micromirror array [3276-10]
Complex microprism structures and their application to multichannel fiber optic switches [3276-16]
Design and fabrication issues in the development of monolithic micro-optical systems [2687-12]
Designs to improve polysilicon micromirror surface topology [3008-11]
Dielectric microfilter arrays for multispectral measuring devices [3008-30]
Electromagnetic near-field induced by surface defects in microstructures [3008-40]
Evanescent field sensing: cavity-coupled refractive index sensor (CRIS) [3276-21]
Fabrication and application of subwavelength gratings [3008-26]
Fabrication of microlens arrays by reactive ion milling [2687-19]
Fabrication of micro-optical surface profiles by using grayscale masks [3276-29]