The standard metal face seal fitting is used throughout the semiconductor industry on process lines that span the range from high pressure to high vacuum. Leakage of fluids out of a system may be catastrophic in those containing toxic, corrosive, or pyrophoric materials. Leakage of moisture and particles into a system has a negative impact on product yields and life expectancy of a gas system because of internal corrosion. This article addresses leakage both into and out of a gas system from fittings under normal and more challenging applications. Torque elimination enhances the reliable functioning of metal face seal fittings that are exposed to shock/vibration.
Torque elimination fittings prevent ultra-high purity gas corrosion site
Materials Performance ; 38 , 9 ; 64-68
1999
5 Seiten, 3 Quellen
Article (Journal)
English
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