This fourth special issue of the 'Microelectronics Journal' on Low Dimensional Structures and Devices is intended to cover progress in the related fields of micro- and nano-technology. Specific topics covered here include: The application of microtechnology for the automotive industry; a surface micromachined accelerometer; microtechnologies for pH ISFET chemical sensors; access to microsystems technology; glasses for microsystems technology; polycrystalline silicon layers for micromechanical applications; epi-micromachining; nano- and micro-technology applications of focused ion beam processing; a laser bumping process for GaAs devices.


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    Title :

    Low dimensional structures and devices: micro- and nano-technology


    Additional title:

    Strukturen und Bauelemente mit geringen Abmessungen: Mikro- und Nanotechnologie


    Contributors:
    Henini, M. (author) / Karam, J.M. (author)

    Published in:

    Microelectronics Journal ; 28 , 4 ; 367-370


    Publication date :

    1997


    Size :

    4 Seiten




    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English




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