This fourth special issue of the 'Microelectronics Journal' on Low Dimensional Structures and Devices is intended to cover progress in the related fields of micro- and nano-technology. Specific topics covered here include: The application of microtechnology for the automotive industry; a surface micromachined accelerometer; microtechnologies for pH ISFET chemical sensors; access to microsystems technology; glasses for microsystems technology; polycrystalline silicon layers for micromechanical applications; epi-micromachining; nano- and micro-technology applications of focused ion beam processing; a laser bumping process for GaAs devices.
Low dimensional structures and devices: micro- and nano-technology
Strukturen und Bauelemente mit geringen Abmessungen: Mikro- und Nanotechnologie
Microelectronics Journal ; 28 , 4 ; 367-370
1997
4 Seiten
Article (Journal)
English
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