A large automotive sensor market will be opened and will receive impetus only if low cost products are provided. One way of decreasing the cost of the sensing elements of sensors is to decrease their size, in order to manufacture a high number of cells in a single process batch. But reducing sensor size does not deal only with making a scaling down operation: it raises a lot of questions. In the case of capacitive sensors, it means that the gap of capacitors is very low (about 1 micron) and the measurement result is consequently affected by the electrostatic pressure occuring when the capacitor is biased. In the same manner, the bandwidth of the sensor is decreased and to encapsulate under controlled pressure can then be required. Critical issues that have be addressed for fabricated sensors with small sensing cells include also packaging and process problems. The different options that have been preserved, regarding to the different problems above mentioned, are here presented.
Silicon sensors for automotive applications
Silicium-Meßaufnehmer für kraftfahrtechnische Anwendungen
1993
8 Seiten, 6 Bilder, 8 Quellen
Conference paper
English
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