The authors have developed a dustless material transportation system, 'SPACE LINEAR', which is composed of newly developed completely contactless electromagnetic suspension system and contactless drive system using linear induction motors. This system is foreseen for use as an automated material transportation system in such an environment that existence of even microscopic dust motes and trivial noise would be important problems. The first commercial based system was installed in a Toshiba semiconductor manufacturing plant in Japan, and put in service from last April. This paper introduces an outline of the entire transportation system, and describes the linear induction motor control system using a microprocessor. Some results obtained from operational experience will be introduced at the conference.
Dust free wafer transportation system for semiconductor plant - an application of new MAGLEV technology
Staubfreies Wafer-Transportsystem fuer eine Halbleiterfabrik - Eine Anwendung der Magnetschwebebahntechnologie
1987
6 Seiten, 11 Bilder, 2 Quellen
Conference paper
English
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