A PCB (print circuit board)-based micro-thruster and a silicon micro-pump are fabricated and integrated into a novel colloid micro-thruster system. The system works on an electrical colloid propulsion principle. A silicon micro-pump is designed and fabricated as the propellant supplying unit of the micro-thruster system, which obtains the maximal volume-flow rate up to 300 mu l/min and the minimum down to 10 mu l/min, with the flow control precision better than 1 mu l/min. The micro-thruster is fabricated with PCB processing technology, which is simpler and cost-cheaper, compared with other micromachining technologies. For the measurement of micro-thrust, an experiment set-up based on a vibration test is developed and applied to the thruster system. The primary test results show that the PCB-based colloid micro-thruster can produce controllable thrust up to the order of mu N.
A colloid micro-thruster system
Microelectronic Engineering ; 61-62 ; 1031-1037
2002
7 Seiten, 5 Quellen
Article (Journal)
English
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