This paper reports on a newly designed flat, angular-rate sensor consisting of a hammer-headed, double-T-structure vibrating element made from a single quartz crystal. It takes advantage of the innate temperature stability of quartz Z-cut plane material by using only driving and detecting mode vibrations in the same crystal plane as the Z-cut wafer thus being highly stable under operating conditions, especially temperature changes, thereby fulfilling the stringent requirements for automobile electronic control systems. Due to its 2-dimensional composition, this angular rate sensor does not need to tune vibrating directions. It can be made from a thinner wafer to shorten the etching time because the thickness hardly influences the sensor properties. Therefore, its design is conducive to mass production at lower fabrication costs being a main requirement for automotive applications. Furthermore, the flat structure is favourable in that the sensor can be easily mounted within narrow spaces. Continued improvement is directed at higher precision and lower cost of the angular-rate sensors by optimisation of the quartz cutting angle, integration of ASIC, application of a compensation circuit, and enhancement of the accuracy of the fabrication process.
Flat quartz angular rate sensor using hammer-headed double-T structure
Flacher Quartzsensor für die Winkelgeschwindigkeit mit einer hammerkopfartigen Doppel-T-Struktur
2002
4 Seiten, 10 Bilder, 1 Tabelle, 5 Quellen
Conference paper
English
Betriebseigenschaft , Coriolis-Kraft , dynamisches Verhalten , Einkristall , elektronischer Regler , Empfindlichkeitsanalyse , Fahrzeugausrüstung , Flachbauform , Massenfertigung , monolithischer Sensor , Neuentwicklung , niedrige Kosten , Resonanzfrequenz , Resonator , Schwingquarz , thermische Stabilität , Verbesserung , Winkelgeschwindigkeitssensor
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