A single-chip CMOS solution is presented for a pressure transducer reaching an 1 % accuracy over the temperature range between -40 and 125 deg C after calibration that delivers a ratiometric analog output voltage and a pulse density digital output. Two on-chip sensors are co-integrated: a surface-micromachined capacitive pressure sensor and a temperature sensor using parasitic bipolar transistors. The surface-micromachined capacitive pressure sensor is fully compatible to a standard CMOS-process and therefore cost-optimized when compared to piezoresistive sensor elements. The sensor signal processing covers the sensor readout, the linerarization, and the temperature sensor based compensation of the temperature sensitivity. A highly efficient parallel and automated calibration based on sigma-delta-modulators requires only a few calibration points for full pressure and temperature range. The two-dimensional calibration procedure has been optimized for parallel processing and allows efficient mass production. The senor chip family has been fabricated in an 1.2 micron CMOS-process with surface micromachining extension and occupies a chip area of 11.8 mm2. The power consumption of the sensor chip is 6 mW using a 5 V power supply.
A single-chip smart pressure sensor family with 2 dimensional calibration
Intelligenter Single-Chip-Drucksensor
2000
7 Seiten, 4 Bilder, 1 Tabelle, 3 Quellen
Conference paper
English
Analogsignal , Ausgangssignal , Bipolartransistor , CMOS-Technik , Delta-Modulation , Digitalsignal , Drucksensor , geringe Verlustleistung , integrierte Schaltung , intelligenter Sensor , Kalibrieren (Abgleichen) , Kostensenkung , Linearitätsbereich , Messbereich , Messgenauigkeit , Mikrofertigung , Mikrosensor , Parallelverarbeitung , Piezowiderstand , Serienfertigung , Signalverarbeitung , Systemvergleich , Temperaturkompensation , Temperatursensor
A Single-Chip Smart Pressure Sensor Family with 2 Dimensional Calibration
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