Abstract The interaction mechanism of continuous soft X-rays with irradiated in vacuum diamond-like carbon (DLC) films, to simulate space environment conditions, was investigated using synchrotron radiation (SR). The thickness of the highly hydrogenated DLC film was found to decrease with increasing SR dose. The variation of local structure of DLC film was evaluated by measurements of the near edge X-ray absorption fine structure of carbon K-edge using SR. The characteristic peaks were observed in the spectrum of highly hydrogenated DLC film before irradiation, with these peaks disappearing from the spectrum after irradiation. These peaks are considered to be derived from the carbon bonding to hydrogen, which was desorbed by the soft X-ray irradiation. The sp2/(sp2 + sp3) ratio of DLC film was found to increase by the irradiation of soft X-ray.


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