The development of electronic materials for flexible electronics would be beneficial for aerospace systems that experience vibrations and other mechanical stresses. Thin-film transistors (TFTs) for transparent flexible displays and sensor technologies are particularly important for both commercial electronics and aerospace systems. Zinc oxide (ZnO), a transparent conducting oxide, is a promising channel material for these applications. Low-temperature synthesis of highly ordered ZnO films over large areas is necessary to facilitate the realization of ZnO-based TFTs on flexible substrates. Growth of columnar (002)-oriented ZnO has been demonstrated on a variety of substrates. The crystal orientation, grain size, mosaicity, and surface morphology of these films, however, are strongly dependent on growth technique and conditions. Energetic growth techniques and higher growth temperatures are typically needed to produce high-quality ZnO with high carrier mobility, but these approaches are not amenable to growth on temperature-sensitive flexible substrates. One potential method to overcome these limitations is the use of a technique with low-energy ions, such as high-power impulse magnetron sputtering (HiPIMS). This chapter discusses low-temperature and scalable deposition of semiconducting grade ZnO channels for TFT applications using reactive HiPIMS. Target currents, ion species, and their energies were measured at the substrate surface location with mass spectroscopy as a function of pressure and applied voltage during HiPIMS of a Zn target in O2/Ar. These plasma parameters were correlated to film microstructure, determined with x-ray diffraction, which helped establish film nucleation and growth mechanisms.


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    Title :

    Materials for Flexible Thin-Film Transistors: High-Power Impulse Magnetron Sputtering of Zinc Oxide


    Additional title:

    Women in Engineering and Science


    Contributors:


    Publication date :

    2020-05-21


    Size :

    14 pages





    Type of media :

    Article/Chapter (Book)


    Type of material :

    Electronic Resource


    Language :

    English