Abstract Multilayer coatings are key optical components in the EUV, soft X-ray and X-ray range. At Institute of Precision Optical Engineering (IPOE), the development of multilayer optics has been impelled for their wide applications in X-ray laser, plasma diagnostics, astronomical observation and synchrotron radiation. The paper presents our recent results of periodic multilayers of Mo/Si, Cr/C, Cr/Sc, La/B4C, Mo/B4C, Si/C, Si/SiC, Mg/SiC Mo/Y and Ru/Y. To improve the reflectivity of Ru/Y multilayer mirrors, Mo layers were inserted between Ru and Y layer. The Mo barrier layers suppress intermixing between Ru and Y, thereby increasing the reflectivity of Ru/Y multilayer. We also discuss the application of Mo/Si, Mo/Y, Mo/B4C, La/B4C non-periodic multilayers in EUV broadband polarization measurement.


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    Title :

    Development of Multilayer Optics in EUV, Soft X-Ray and X-Ray Range at IPOE


    Contributors:
    Wang, Zhanshan (author) / Zhu, Jingtao (author) / Zhang, Zhong (author) / Cheng, Xinbin (author) / Xu, Jing (author) / Wang, Fengli (author) / Wang, Xiaoqiang (author) / Chen, Lingyan (author)

    Published in:

    X-Ray Lasers 2008 ; 7 ; 391-399


    Publication date :

    2009-01-01


    Size :

    9 pages





    Type of media :

    Article/Chapter (Book)


    Type of material :

    Electronic Resource


    Language :

    English




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