Electro-optical probe developed to perform noncontact, nondestructive, and relatively noninvasive measurements of electric fields over broad spectrum at millimeter and shorter wavelengths in integrated circuits. Manipulated with conventional intregrated-circuit-wafer-probing equipment and operated without any special preparation of integrated circuits. Tip of probe small electro-optical crystal serving as proximity electric-field sensor.
Electro-optical Probing Of Terahertz Integrated Circuits
NASA Tech Briefs ; 14 , 8
1990-08-01
Miscellaneous
No indication
English
Active Micromachined Integrated Terahertz Circuits
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