Electro-optical probe developed to perform noncontact, nondestructive, and relatively noninvasive measurements of electric fields over broad spectrum at millimeter and shorter wavelengths in integrated circuits. Manipulated with conventional intregrated-circuit-wafer-probing equipment and operated without any special preparation of integrated circuits. Tip of probe small electro-optical crystal serving as proximity electric-field sensor.


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    Title :

    Electro-optical Probing Of Terahertz Integrated Circuits


    Contributors:

    Published in:

    Publication date :

    1990-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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