To eliminate the scattering loss at the crossing points of busline waveguides, a multilevel crossing structure of busline waveguide was introduced into the vertically coupled microring resonator filter. The top surface of each buried waveguide was perfectly planarized by a new fabrication process and clear filter responses were observed for a single ring and a double series coupled ring resonator with multilevel crossing busline waveguides.
Vertically coupled microring resonator filter with multilevel crossing busline waveguide
2003-01-01
82476 byte
Conference paper
Electronic Resource
English
Vertically coupled microring resonator filter with multilevel crossing busline waveguide
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