A sensor using sinusoidal phase-modulation of 1.5MHz generated by modulating the injection current of a laser diode measures a phase of the interference signal with a measuring time of 0.25μs and an error less than 20nm in displacement.
Displacement sensor by a sinusoidal phase-modulating laser diode interferometer using optical fibers
2005-01-01
222407 byte
Conference paper
Electronic Resource
English
British Library Conference Proceedings | 2001
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