We have been developing a high repetition (5 kHz) and high power (5 kW) Nd:YAG laser system for EUV lithography. Key subjects are (1) reliable front-end, (2) uniform and high density pumping of main amplifier rods, and (3) compensation of thermal effects. Fairly good uniformity was achieved by adjusting pumping geometry. Detail system analysis suggests that 8 amplifier modules pumped at 24.0 kW power are required to get output of 5 kW under relatively small thermal effects.


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    Title :

    High power and high repetition Nd:YAG laser pumped by cw LDs


    Contributors:
    Fujita, H. (author) / Nakatsuka, M. (author) / Mitra, A. (author) / Wang, T. (author) / Tsubakimoto, K. (author) / Fijimoto, Y. (author) / Yoshida, H. (author) / Miyanaga, N. (author) / Izawa, Y. (author) / Matsuoka, S. (author)


    Publication date :

    2005-01-01


    Size :

    622059 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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