Emission in the extreme ultraviolet (EUV) wavelength from Xe and Sn plasmas pumped by either laser irradiation (LPP) or discharge (DPP) has been studied toward its application to semiconductor technology. In this paper, identification of emission lines and analysis of spectral profile are presented, based on the atomic structure and rate coefficient calculation using HULLAC, and atomic process simulation using the whiam collisional radiative (CR) model.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Theoretical analysis of EUV spectrum of Xe and Sn


    Contributors:
    Sasaki, A. (author)


    Publication date :

    2003-01-01


    Size :

    103233 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Theoretical Analysis of EUV Spectrum of Xe and Sn

    IEEE | British Library Conference Proceedings | 2003




    Theoretical free oscillations spectrum for Saturn interior models

    Gudkova, T.V. / Zharkov, V.N. | Elsevier | 2006


    Theoretical free oscillations spectrum for Saturn interior models

    Gudkova, T. V. / Zharkov, V. N. / COSPAR | British Library Conference Proceedings | 2006