One approach to compact UV light sources is an all-solid-state 193 nm laser system, which utilizes an Er-doped fiber amplifier (EDFA) of 1547 nm wavelength as part of the fundamental light source, and five-stage frequency conversion optics for generating the eighth harmonic of 193 nm light. We propose the use of Gd/sub x/Y/sub 1-x/Ca/sub 4/O(BO/sub 3/)/sub 3/ as the fourth-harmonic crystal to improve the wavelength conversion optics, and report the results of durability tests up to 500 hours.


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    Title :

    A 193 nm light source using fiber amplifier and nonlinear wavelength conversion


    Contributors:
    Owa, S. (author) / Doi, M. (author) / Kawai, H. (author) / Kitano, H. (author) / Miwa, S. (author) / Matsuura, H. (author) / Tokuhisa, A. (author)


    Publication date :

    2001-01-01


    Size :

    120125 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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