A method to measure electrical conductivity of GaAs wafers by millimeter waves is presented. A compact equipment working at 94 GHz was used to measure the millimeter wave signal reflected from the wafer surface. A contactless measurement is realized and the measurement result is independent of the thickness of the wafer.


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    Title :

    Contactiess Measurement of Conductivity of GaAs Wafers by Millimeter Waves


    Contributors:
    Ju, Y. (author)


    Publication date :

    2006-09-01


    Size :

    1215629 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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