A method to measure electrical conductivity of GaAs wafers by millimeter waves is presented. A compact equipment working at 94 GHz was used to measure the millimeter wave signal reflected from the wafer surface. A contactless measurement is realized and the measurement result is independent of the thickness of the wafer.
Contactiess Measurement of Conductivity of GaAs Wafers by Millimeter Waves
2006-09-01
1215629 byte
Conference paper
Electronic Resource
English
Superheterodyne Amplification of Sub Millimeter Electromagnetic Waves in an n-GaAs Film
British Library Online Contents | 2003
|British Library Online Contents | 1998
|Millimeter waves for communications
IEEE | 1989
|British Library Online Contents | 2001
|Can Millimeter Waves Generate Electroporation?
British Library Online Contents | 2002
|