It is possible to tune the refractive index (n) of a TiO/sub 2/ film to the optimum value for an encapsulated silicon solar cell by annealing the coating after deposition. Annealing causes a change in the volume fraction of rutile and this was examined as a function of annealing temperature for thin (/spl sim/70 nm) TiO/sub 2/ films on a silicon substrate using micro-Raman spectroscopy and glancing angle X-ray diffraction. Both techniques were able to monitor the progression of the phase change in the films. Micro-Raman spectroscopy provided a rapid means to monitor the phase change and could detect phase fractions below approximately 5%. Glancing angle X-ray diffraction provided quantitative results but the technique was considerably more time consuming. The results indicated that the refractive index varied linearly with the rutile phase fraction.


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    Title :

    Phase characterisation of TiO/sub 2/ thin films using micro-Raman spectroscopy and glancing angle X-ray diffraction


    Contributors:
    Hugmann, J. (author) / Richards, B.S. (author) / Crosky, A. (author)


    Publication date :

    2002-01-01


    Size :

    162219 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Phase Characterisation of TiO~2 Thin Films using Micro-Raman Spectroscopy and Glancing Angle X-ray Diffraction

    Hugman, J. / Richards, B. S. / Crosky, A. et al. | British Library Conference Proceedings | 2002


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