This paper investigates the implementation of a least squares estimation of varactor capacitance values across a wafer for reasons of characterizing thin-film ferroelectric Ba0.6Sr0.4TiO3, barium strontium titanate (BST). The varactor design utilized for this characterization as well as an equivalent schematic representation of the device used will be presented. Comparisons between the estimated thin-film performance and those of previously presented results will also be discussed.
Ferroelectric thin-film characterization through use of coplanar waveguide varactors
2012-07-01
495091 byte
Conference paper
Electronic Resource
English
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