Methods for forming microstructures in photocurable material are described. At least one image of light or radiation for curing the photocurable material is applied in a pattern corresponding to the image. The image is formed by near-field diffraction of the light or radiation and comprises areas of higher intensity adjacent to areas of lower intensity.

    L'invention concerne des procédés de formation de microstructures dans un matériau photodurcissable. Au moins une image de lumière ou de rayonnement pour durcir le matériau photodurcissable est appliquée selon un motif correspondant à l'image. L'image est formée par diffraction en champ proche de la lumière ou du rayonnement et comprend des zones d'intensité plus forte adjacentes à des zones d'intensité plus faible.


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    Title :

    SYSTEMS AND METHODS FOR FABRICATING MICROSTRUCTURES


    Additional title:

    SYSTÈMES ET PROCÉDÉS POUR LA FABRICATION DE MICROSTRUCTURES



    Publication date :

    2020-12-03


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen , PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES / B05D PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL , Verfahren zum Aufbringen von Flüssigkeiten oder von anderen fließfähigen Stoffen auf Oberflächen allgemein / B63B Schiffe oder sonstige Wasserfahrzeuge , SHIPS OR OTHER WATERBORNE VESSELS / B64C AEROPLANES , Flugzeuge / B81B Mikrostrukturbauelemente oder -systeme, z.B. mikromechanische Bauelemente , MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES / B81C Verfahren oder Geräte besonders ausgebildet zur Herstellung oder Behandlung von Mikrostrukturbauelementen oder -systemen , PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS / G02B Optische Elemente, Systeme oder Geräte , OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS



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