A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.
SYSTEM AND METHOD FOR MEASURING MAGNETIC FIELDS IN PVD SYSTEM
2023-12-07
Patent
Electronic Resource
English
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