Design and properties research of capacitive RF-MEMS switch
Erforschung der Konstruktion und Eigenschaften des kapazitiven RF-MEMS Schalters.
2012
9 pages
Int.Journal of Simulation&Process Modelling;7(2012)1/2 ;123-131
Article (Journal)
English
An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer
Springer Verlag | 2022
|Performance Analysis and Simulation of MEMS Capacitive Pressure Sensor
Springer Verlag | 2022
|CANEUS2006-11070 Standard Mems Capacitive Accelerometers for Harsh Environment
British Library Conference Proceedings | 2006
|MEMS based integrated optical waveguide switch
IEEE | 2003