This paper presents the control performance of a high-precision positioning device using the hybrid actuator composed of a piezoelectric (PZT) actuator and a voice-coil motor (VCM). The combined piezo-VCM actuator features two main characteristics: a large operation range due to long stroke of the VCM, and high precision and heavy load positioning ability due to PZT impact force. A one-degree-of-freedom (DOF) experimental setup was configured to examine the fundamental characteristics, and the control performance was effectively demonstrated by using a switching controller. In rough positioning state, an integral variable structure controller (IVSC) was used for the VCM to conduct long range of operation; in precision positioning state, an impact force controller (IFC) for the PZT actuator coupled with presliding states of the sliding table was used to obtain high-precision position control and achieve both forward and backward actuations. The experimental results showed that the sliding table having a mass of 881g and with a preload of 10 N was successfully positioned within the positioning accuracy of 10 nm in both forward and backward position controls.


    Access

    Download


    Export, share and cite



    Title :

    One-DOF Precision Position Control using the Combined Piezo-VCM Actuator


    Contributors:

    Publication date :

    2009-08-26


    Remarks:

    oai:zenodo.org:1063026



    Type of media :

    Article (Journal)


    Type of material :

    Electronic Resource


    Language :

    English



    Classification :

    DDC:    629





    Active engine mount with piezo-actuator for vibration control

    Ushijima,T. / Kumakwa,S. / Bridgestrone,JP | Automotive engineering | 1993


    LQG FLUTTER CONTROL OF WIND TUNNEL MODEL USING PIEZO-CERAMIC ACTUATOR

    Kaneko, T. / Asano, Y. / International Council of the Aeronautical Sciences | British Library Conference Proceedings | 2006


    Active Engine Mount with Piezo-Actuator for Vibration Control

    Kumakawa, Syoichi / Ushijima, Takao | SAE Technical Papers | 1993