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    Title :

    Modeling of Heat and Mass Transfer in a Cold Wall CVD Reactor for Large Area Poly-SiC Film Deposition


    Contributors:
    Wang, Rong (author) / Ma, Ronghui (author)

    Conference:

    9th AIAA/ASME Joint Thermophysics and Heat Transfer Conference



    Publication date :

    2006-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English





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