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    Title :

    High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition


    Contributors:


    Publication date :

    2013


    Size :

    X, 126 S.


    Remarks:

    zahlr. Ill., graph. Darst.
    Digital preservation by Sächsische Landesbibliothek - Staats- und Universitätsbibliothek Dresden



    Type of media :

    Theses


    Type of material :

    Print


    Language :

    English



    Classification :

    DDC:    621.31244 / 620 / 621.3 / 500
    RVK:    ZN 4174
    BKL:    53.36 Energiedirektumwandler, elektrische Energiespeicher