High-rate growth of hydrogenated amorphous and microcrystalline silicon for thin-film silicon solar cells using dynamic very-high frequency plasma-enhanced chemical vapor deposition
2013
X, 126 S.
zahlr. Ill., graph. Darst.
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Theses
English
High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma
Online Contents | 2001
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