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    Title :

    Optical Quality Improvement of Si Photonic Devices Fabricated by Focused-Ion-Beam Milling


    Contributors:
    Tian, J. (author) / Yan, W. (author) / Liu, Y. (author) / Luo, J. (author) / Zhang, D. (author) / Li, Z. (author) / Qiu, M. (author)

    Published in:

    Publication date :

    2009-01-01


    Size :

    4306 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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