193-nm coatings resist excimer-laser damage
LASER FOCUS WORLD ; 40 ; 93-98
2004-01-01
6 pages
Article (Journal)
English
DDC: | 621.366 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Deep-ultraviolet coatings resist optical damage
British Library Online Contents | 1997
|Excimer-laser-assisted deposition of diamondlike carbon hard coatings [3097-55]
British Library Conference Proceedings | 1997
|Polyurethane resins as resist materials for excimer ablation lithography (EAL) [2992-19]
British Library Conference Proceedings | 1997
|SPIE | 1988
|Excimer Laser Micromachining/Marking
SAE Technical Papers | 1989
|