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    Title :

    Realization of micro-optic and integrated optic components by electron-beam-lithographic surface profiling and ion exchange in glass


    Contributors:
    Kley, E.-B. (author) / Possner, T. (author) / Goering, R. (author)

    Published in:

    Publication date :

    1993-01-01


    Size :

    513 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    621.381045




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