Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    High-Power Laser Processing for Microelectronics Devices


    Contributors:
    Toyoda, K. (author)


    Publication date :

    1993-01-01


    Size :

    131 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    621.381045





    Excimer laser projector for microelectronics applications

    Rumsby, Phil T. / Gower, Malcolm C. | SPIE | 1991


    Integration of silicon electroluminescent devices with silicon microelectronics

    Hirschman, K.D. / Tsybeskov, L. / Duttagupta, S.P. et al. | IEEE | 1997


    Shapeable microelectronics

    Karnaushenko, Daniil | TIBKAT | 2016

    Free access