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    Title :

    Development of a Single-Mass Five-Axis MEMS Motion Sensor



    Conference:

    13th, International Forum on Advanced Microsystems for Automotive Applications; Smart systems for safety, sustainability, and comfort ; 2009 ; Berlin, Germany



    Publication date :

    2009-01-01


    Size :

    22 pages


    Remarks:

    Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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