Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Conversion Efficiency Calculations for Soft X-Rays Emitted from Tin Plasma for Lithography Applications



    Conference:

    Conference; 11th, X ray lasers ; 2008 ; Belfast, Northern Ireland



    Publication date :

    2009-01-01


    Size :

    8 pages


    Remarks:

    Includes bibliographical references.



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English


    Keywords :


    Conversion Efficiency Calculations for Soft X-Rays Emitted from Tin Plasma for Lithography Applications

    Demir, P. / Kacar, E. / Bilikmen, S. K. et al. | Springer Verlag | 2009


    High conversion efficiency limited laser plasma source for EUV lithography

    Keyser, C. / Koay, C.-S. / Takenoshita, K. et al. | IEEE | 2003


    Concentrations of Soft X-Rays

    Tolstikhin, O. I. / Vinogradov, A. V. | British Library Online Contents | 1995


    Radiation emitted from rocket plumes

    Deimling, L. / Liehmann, W. / Eisenreich, N. et al. | Tema Archive | 1997


    Phase-matching efficiently produces soft x-rays

    British Library Online Contents | 1998