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    Title :

    2008-01-0915 Static and Dynamic Instabilities of Electrostatic Actuated MEMS Devices


    Contributors:

    Conference:

    SESSION, Vehicle sensors and actuators ; 2008 ; Detroit, Mich


    Published in:

    SAE SP ; 2191


    Publication date :

    2008-01-01


    Size :

    16 pages


    Remarks:

    Held during the SAE 2008 world congress



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Static and dynamic instabilities of electrostatic actuated MEMS devices

    Beloiu,D.M. / Wayne State Univ.,Detroit,US | Automotive engineering | 2008


    Static and Dynamic Instabilities of Electrostatic Actuated MEMS Devices

    Beloiu, Dumitru M. | SAE Technical Papers | 2008


    Etude technique Ford Cargo 0611-0811-0915-1015-1115-1315-1515 Moteur

    Ford Europe,GB | Automotive engineering | 1985