Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Fabricating a silicon microlens mold by ICP dry etching



    Conference:

    5th, Pacific Rim conference on lasers and electro-optics; photonics lights innovation: from nano-structures and devices to systems and networks ; 2003 ; Taipei, Taiwan



    Publication date :

    2003-01-01


    Size :

    565 pages


    Remarks:

    Includes bibliographic references and author index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Fabricating a silicon microlens mold by ICP dry etching

    Chen, R.L. / Wang, C.M. / Chang, J.Y. | IEEE | 2003


    Novel method for fabricating microlens arrays [3099-11]

    Guo, L. R. / Chen, B. / Pang, L. et al. | British Library Conference Proceedings | 1997


    128 x 128-element silicon microlens array fabricated by ion-beam etching for PtSi IRCCD [3551-32]

    Zhang, X. / Yi, X. / He, M. et al. | British Library Conference Proceedings | 1998



    Fabrication of refractive microlens array by etching ammonium dichromate gelatin (ADG) with enzyme [4179-14]

    Yao, J. / Gao, F. / Zhang, Y. et al. | British Library Conference Proceedings | 2000