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    Title :

    Stroboscopic step height measurement with two-wavelength interferometer using a single diode laser source [5265-18]



    Conference:

    Conference, Two- and Three-Dimensional Vision Systems for Inspection, Control, and Metrology ; 2003 ; Providence, R.I



    Publication date :

    2004-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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