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    Title :

    Application of phase shifting technique for SEM scanning moire method in MEMS [5058-52]



    Conference:

    Conference, Optical technology and image processing for fluids and solids diagnostics ; 2002 ; Beijing



    Publication date :

    2003-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Three-dimensional moire interferometer [5058-49]

    Dai, F. / Shang, H. / Li, C. et al. | British Library Conference Proceedings | 2003


    Moire interferometry and carrier technique for interfacial fracture behavior analysis [5058-54]

    Cheng, J. / Fang, R. / Zheng, W. et al. | British Library Conference Proceedings | 2003


    Micro-deformation measurement using focused ion-beam moire method [5058-51]

    Xie, H. / Li, B. / Geer, R. E. et al. | British Library Conference Proceedings | 2003


    Moire interferometry applied to ferroelectric ceramics [5058-53]

    Liu, Z. W. / Fang, D. N. / Xie, H. et al. | British Library Conference Proceedings | 2003


    Laser moire deflectometry applicable for mini/micro-scale flow visualization [5058-41]

    Song, Y. / Zhang, X. / Zhang, H. et al. | British Library Conference Proceedings | 2003