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    Title :

    Theoretical study of surface MEMS RF switch structure [4414-57]


    Contributors:
    Jia, M. (author) / Guo, F. (author) / Zhu, Z. (author) / Lai, Z. (author) / Chu, J. (author) / Wang, Y. (author) / Ge, X. (author) / Yang, Y. (author) / Zhou, Y. / Xu, S.

    Conference:

    International conference, Sensor technology; (ISTC 2001) ; 2001 ; Wuhan, China



    Publication date :

    2001-01-01


    Size :

    4 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Surface micromachined miniature RF switch [4414-56]

    Guo, F. / Lai, Z. / Zhu, Z. et al. | British Library Conference Proceedings | 2001


    Nr. 4414

    DataCite | 1930


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    Cong, P. / Liu, Y. / Ren, T. et al. | British Library Conference Proceedings | 2001


    Analysis of the structure of a high-g-force MEMS accelerometer [4414-65]

    Song, P. / Li, K. / Shi, G. et al. | British Library Conference Proceedings | 2001


    Novel micro electromagnetic relay based on MEMS technology [4414-87]

    Zhang, Y. / Li, D. / Wang, D. et al. | British Library Conference Proceedings | 2001