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    Title :

    FEA modeling of a thermally excited silicon-beam resonant pressure sensor [4414-50]


    Contributors:
    Chen, D. (author) / Cui, D. (author) / Wang, L. (author) / Yu, Z. (author) / Cui, Z. (author) / Xia, S. (author) / Zhou, Y. / Xu, S. / SPIE

    Conference:

    International conference, Sensor technology; (ISTC 2001) ; 2001 ; Wuhan, China



    Publication date :

    2001-01-01


    Size :

    4 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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