Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Traceable measurement results from scanning probe microscopes by laser interferometry [4420-21]



    Conference:

    Technical conference, Laser metrology for precision measurement and inspection in industry ; 1999 ; Florianopolis, Brazil



    Publication date :

    2001-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4420

    DataCite | 1930


    Sources of error in absolute distance interferometry [4420-01]

    Stone, J. A. / Stejskal, A. / Howard, L. P. et al. | British Library Conference Proceedings | 2001


    High-precision measurement of cylinder form deviations with grazing incidence interferometry [4420-02]

    Weckenmann, A. / Kersting, T. / Schimke, W. et al. | British Library Conference Proceedings | 2001


    Laser-based measurement to nanometer scale accuracy [4420-22]

    Jager, G. / Society for Optical Engineering / IMEKO - The International Measurement Confederation et al. | British Library Conference Proceedings | 2001


    User's guide to IR detectors [4420-09]

    Boreman, G. D. / Society for Optical Engineering / IMEKO - The International Measurement Confederation et al. | British Library Conference Proceedings | 2001