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    Title :

    Interferometric length and roughness measurements with nanometer accuracy level [4420-03]



    Conference:

    Technical conference, Laser metrology for precision measurement and inspection in industry ; 1999 ; Florianopolis, Brazil



    Publication date :

    2001-01-01


    Size :

    12 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Laser-based measurement to nanometer scale accuracy [4420-22]

    Jager, G. / Society for Optical Engineering / IMEKO - The International Measurement Confederation et al. | British Library Conference Proceedings | 2001


    Nr. 4420

    DataCite | 1930


    Interferometric method for in-situ characterization of coating industrial processes [4420-07]

    Michels, A. F. / Horowitz, F. / Society for Optical Engineering et al. | British Library Conference Proceedings | 2001


    User's guide to IR detectors [4420-09]

    Boreman, G. D. / Society for Optical Engineering / IMEKO - The International Measurement Confederation et al. | British Library Conference Proceedings | 2001


    Comparison between laser interferometric and calibrated artifacts for the geometric test of machine tools [4420-08]

    Sousa, A. R. / Schneider, C. A. / Society for Optical Engineering et al. | British Library Conference Proceedings | 2001