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    Title :

    Variable angle spectroscopic ellipsometry in the vacuum ultraviolet (Invited Paper) [4099-24]


    Contributors:

    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Ellipsometry: a sophisticated tool for optical metrology (Invited Paper) [4099-23]

    Azzam, R. M. A. / SPIE | British Library Conference Proceedings | 2000


    Standardization in optics characterization (Invited Paper) [4099-14]

    Ristau, D. / SPIE | British Library Conference Proceedings | 2000


    Fast-scanning ellipsometry for thin film characterization [4099-39]

    Berge, C. / Krasilnikova, A. / Masetti, E. et al. | British Library Conference Proceedings | 2000


    Nr. 4099

    DataCite | 1924


    Lithography: a look at what is ahead (Invited Paper) [4099-01]

    Levinson, H. J. / SPIE | British Library Conference Proceedings | 2000