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    Title :

    Characterization of laser-produced gas-puff plasmas for soft x-ray projection lithography [3886-84]


    Contributors:
    Suzuki, M. (author) / Daido, H. (author) / Choi, I. W. (author) / Tang, H. (author) / Yamagami, S. (author) / Nagatomo, H. (author) / Bartnik, A. (author) / Fiedorowicz, H. (author) / Yu, W. (author) / Nakayama, T. (author)

    Conference:

    Conference, High-power lasers in energy engineering ; 1999 ; Osaka, Japan



    Publication date :

    2000-01-01


    Size :

    8 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Forster, E. / Butzbach, R. / Gibbon, P. et al. | British Library Conference Proceedings | 2000


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    Habara, H. / Kodama, R. / Sentoku, Y. et al. | British Library Conference Proceedings | 2000


    Nr. 3886

    DataCite | 1920


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    X-ray emission from solid plasmas generated by femtosecond high-intensity laser pulses [3886-81]

    Banerjee, S. / Issac, R. C. / Rajeev, P. P. et al. | British Library Conference Proceedings | 2000