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    Title :

    Optical measurement of LIGA milliengine performance [3276-02]



    Conference:

    Conference; 3rd, Miniaturized systems with micro-optics and micromechanics ; 1998 ; San Jose; CA



    Publication date :

    1998-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 3276

    DataCite | 1908


    MEMS-based diffractive optical-beam-steering technology [3276-07]

    Winick, D. A. / Duewer, B. / Chaudhury, S. et al. | British Library Conference Proceedings | 1998



    Nonsilicon micromachining for MOEMS elements [3276-28]

    Chen, Y.-X. / Zhao, X.-L. / Wang, Z.-G. et al. | British Library Conference Proceedings | 1998


    Piezoelectrical elements for micro-optical applications (Invited Paper) [3276-22]

    Goetz, B. / Martin, T. / Buecker, P. et al. | British Library Conference Proceedings | 1998