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    Title :

    Silicon mirror arrays fabricated by using bulk and surface micromachining [3008-34]



    Conference:

    Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA



    Publication date :

    1997-01-01


    Size :

    10 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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