Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Design and fabrication of high-performance silicon micromachined resonant microscanners for optical scanning applications


    Contributors:
    Kjang, M.-H. (author) / Muller, R. S. (author) / Lau, K. Y. (author)

    Conference:

    Topical meeting, Integrated photonics research ; 1996 ; Boston; MA



    Publication date :

    1996-01-01


    Size :

    4 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Micromachined microscanners for optical scanning [3008-09]

    Kiang, M.-H. / Solgaard, O. / Muller, R. S. et al. | British Library Conference Proceedings | 1997


    Dynamic Modeling of Comb-Driven Microscanners

    Urey, H. / Kan, C. / Ataman, C. et al. | British Library Conference Proceedings | 2004


    Cantilever microscanners for free-space optical interconnects [4652-26]

    Xu, B. / Tokranova, N. / Castracane, J. et al. | British Library Conference Proceedings | 2002


    Two-dimensional miniature optical-scanning sensor with silicon micromachined scanning mirror [3008-12]

    Ikeda, M. / Goto, H. / Totani, H. et al. | British Library Conference Proceedings | 1997


    Performance and design of a silicon micromachined gyro

    Hopkin, I. D. / Windermer, R. / Institution of Electrical Engineers et al. | British Library Conference Proceedings | 1997