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    Title :

    Excimer laser micromachining based on dielectric masks [2246-07]


    Contributors:

    Conference:

    Conference, Laser materials processing and machining ; 1994 ; Frankfurt; Germany



    Publication date :

    1994-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 2246

    DataCite | 1888


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    Stauter, C. / Fontaine, J.-J. / Engel, T. et al. | British Library Conference Proceedings | 1994